SEMIFLOW CO.65 / SEMIFLOW CO.66 PI Ex1 | Clamp-On Flow Sensor

for non-contact flow measurement on rigid plastic tubes & pipes


  • Ultrasonic clamp-on flow sensor for contactless flow measurement of up to 400 L/min
  • Use at PFA or other hard plastic tubes and pipes
  • No costly process disturbances in case of sensor exchange or retrofit
  • Highly accurate measurement performance
  • Sensor set for hazardous environments according to ATEX/IECEx (Ex Zone 1)
  • Support of all current industrial interfaces

Get a Quote

Contactless flow sensor for highly pure semiconductor applications 

The semiconductor industry is characterized by a number of processes in which different abrasive, adherent, corrosive and ultra-pure liquids are used. To assure the stability and high quality of these processes, a constant flow monitoring of those liquids is of utmost importance.

SEMIFLOW CO.65 clamp-on flow sensor: the ultimate tool for Semiconductor Applications

  • Highly precise flow and volume measurement
  • Innovative contact-free clamp-on architecture to eliminate risk of contamination and leakages
  • No system downtime in case of sensor exchange or retrofit
  • No external electronics to guarantee a compact design and simple handling
  • Permanent mount or quick relocation when needed
  • Special sensor package for the use in hazardous areas of Zone 1 according to ATEX/IECEx

SEMIFLOW CO.65 Ultrasonic Clamp-on Flow Sensor - Key Features

Excellent Measurement Performance

  • Real-time instantaneous flow measurement and volume totalizing
  • Reliable flow measurement up to 400 L/min
  • Accuracy of +/- 2%

Technical Sensor Properties

  • Plastic housing (PVC-C) and plastic connector (PA)
  • Screwed lid and flexible inlay for optimal coupling between tube and transducer

Plug & Play Sensor- & Tubing Fit

  • Integrated electronics board and analysis unit
  • 8 different sensor sizes (¼", 3/8", ½", (¾"), 1", 1 ¼“, 40A, 50A OD) for a wide range of tube sizes
  • Ideally suited for PFA and other hard plastic tubes and pipes

Easy System Integration

  • Easy integration into existing PLC or pump systems via RS485 interface
  • Optional SONOFLOW® C³ | Software to provide user-friendly sensor operation and adjustment features

If you want to perform non-contact measurements on flexible plastic tubes:
CO.55 Ultrasonic Clamp-on Flow Meter

Useful SEMIFLOW Accessories


SONOFLOW® C³ | Software constitutes a milestone in user-friendly smart sensoring. The software assures a straightforward application of SEMIFLOW sensors in regard of

  • SEMIFLOW sensor operations
  • SEMIFLOW sensor adjustments

Click for further details


SONOFLOW® RD.10 | Remote Display is the convenient accessory for easy connection with all SEMIFLOW sensors to guarantee

  • Permanent or temporary on the spot data analyzing
  • Zero calibration and volume reset

Click for further details


  • Single wafer cleaning equipment
  • Lithography equipment
  • Mixing equipment
  • Chemical supply system
  • Slurry lines

Follow us


Mandy Reber

Do you have any questions?

Mandy Reber

+49 (0)345 / 133 17-832