Ultrasonic Clamp-On Flow Sensor

SEMIFLOW® CO.65 and SEMIFLOW® CO.66 PI Ex1 for Non-Contact Flow Measurement on Rigid Plastic Tubes & Pipes

SEMIFLOW CO.65 non-contact clamp-on flow sensors are ideal to measure abrasive, adherent, corrosive, and ultra-pure liquids on rigid plastic tubes and pipes used in the semiconductor industry. Equipped with an integrated electronic unit, they function as a complete flow meter in the size of a small transducer without an external board or transmitter.

For non-contact measurements on flexible plastic tubes the SONOFLOW CO.55 Ultrasonic Clamp-on Flow Meter is the perfect solution.

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Sensor Selection Guide

Product Benefits

  • Highly precise ultrasonic clamp-on flow sensor
  • Innovative contact-free architecture to eliminate risk of contamination and leakage, thus increasing uptime
  • Use at PFA, PTFE or other hard plastic tubes and pipes
  • No system downtime in case of sensor exchange or retrofit
  • Sensor set for hazardous environments according to ATEX / IECEx (Ex Zone 1)
  • Support of all current industrial interfaces

SEMIFLOW® CO.65 Ultrasonic Clamp-On Flow Sensor: Application Fields

  • Single wafer cleaning equipment
  • Lithography equipment
  • Mixing equipment
  • Chemical supply system
  • Slurry lines

More Information about Ultrasonic Flow Meters

Product Overview

Ultrasonic Flow Meter


Application Notes for Medtech, Biotech and Semiconductor


Knowledge Center

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For more information regarding applications and pricing, please feel free to contact us.

Receiver: anja.lausch@sonotec.de

Do you have any questions?

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Anja Lausch

Sales Assistant
+49 345 13317-840