Ultrasonic Clamp-On Flow Sensor

SEMIFLOW® CO.65 and SEMIFLOW® CO.66 PI Ex1 for Non-Contact Flow Measurement on Rigid Plastic Tubes & Pipes

SEMIFLOW CO.65 non-contact clamp-on flow sensors are ideal to measure abrasive, adherent, corrosive, and ultra-pure liquids on rigid plastic tubes and pipes used in the semiconductor industry. Equipped with an integrated electronic unit, they function as a complete flow meter in the size of a small transducer without an external board or transmitter.

For non-contact measurements on flexible plastic tubes the SONOFLOW CO.55 Ultrasonic Clamp-on Flow Meter is the perfect solution.

Get a Quote

Product Benefits

  • Highly precise ultrasonic clamp-on flow sensor
  • Flow measurement of up to 400 L/min
  • Innovative contact-free architecture to eliminate risk of contamination and leakage, thus increasing uptime
  • Use at PFA, PTFE or other hard plastic tubes and pipes
  • No system downtime in case of sensor exchange or retrofit
  • Sensor set for hazardous environments according to ATEX / IECEx (Ex Zone 1)
  • Support of all current industrial interfaces

SEMIFLOW® CO.65 Ultrasonic Clamp-On Flow Sensor: Application Fields

  • Single wafer cleaning equipment
  • Lithography equipment
  • Mixing equipment
  • Chemical supply system
  • Slurry lines

More Information about Ultrasonic Flow Meters

Product Overview

Ultrasonic Flow Meter

Applications

Application Notes for Medtech, Biotech and Semiconductor

Expertise

Knowledge Center

Contact Us!

We will be happy to help you.

Receiver: mandy.reber@sonotec.de

Do you have any questions?

Feel free to contact us! We will be happy to help you.

Mandy Reber

Sales Assistant
+49 345 13317-832