Flow Measurement & Air Bubble Detection in the Semiconductor Industry

Non-Contact Flow Sensors & Bubble Detectors for the Semiconductor Industry

In the semiconductor industry the compact sensors from SONOTEC play an important role in wafer manufacturing. In different wet processes several abrasive, adherent, and corrosive liquids are used. The advantage of the sensors here is that their measurement is non-invasive and non-intrusive and therefore is ideal to both measure flow and detect air bubbles.


If a cleaning solution is under- or overdosed, additional resources are required, since the cleaning process needs to be repeated. At worst, the wafers must be discarded and a huge loss in value is incurred. A precise flow measurement is therefore decisive for an efficient use of the production resources.

SEMIFLOW CO.65 Flow Sensor for Semiconductor Applications

SEMIFLOW CO.65 Flow Sensor
… highly accurate non-contact flow meters for application on rigid plastic tubes and pipes




The presence of air bubbles in critical processes can have extensive consequences in wafer manufacturing. In photolithography the occurrence of air bubbles in photoresist may cause a defect of the wafers; air bubbles in process coolant may lead to an interruption of production processes. A timely detection of air bubbles is therefore crucial to achieve production targets.

SONOCHECK ABD06 Air Bubble Sensor for industrial applications

SONOCHECK ABD06 Air Bubble Detector
... precise air bubble detection of up to 1/3 of the inner diameter of the plastic tubes applied

Advantages of non-invasive measurement

  • Contact- and contamination-free process monitoring
  • Applicable for a wide range of media
  • Simple tube insertion
  • Simple retrofit
  • No equipment downtime in case of sensor exchange
  • No risk of leakages
  • No wear and tear
  • Improved and more reliable plant productivity and therefore improved yield


  • Single wafer cleaning equipment
  • Lithography equipment
  • Mixing equipment
  • Chemical supply system
  • Slurry lines

Further Applications


Mandy Reber

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Mandy Reber

+49 (0)345 / 133 17-832

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